Uphuhliso olukhawulezayo kwiinkalo zolwazi kunye ne-optoelectronics lukhuthaze uhlaziyo oluqhubekayo lwetekhnoloji ye-chemical mechanical polishing (CMP).Ukongeza kwizixhobo kunye nezixhobo, ukufunyanwa kweendawo eziphezulu eziphezulu ezichanekileyo kuxhomekeke ngakumbi kwi-design kunye nemveliso yemveliso yeengqungquthela eziphezulu ze-abrasive particles, kunye nokulungiswa kwe-slurry yokupholisa ehambelanayo.Kwaye ngokuphuculwa okuqhubekayo kokuchaneka kokulungiswa komphezulu kunye neemfuno ezisebenzayo, iimfuno zemathiriyeli yokugudisa yomgangatho ophezulu nazo ziya zinyuka ngokunyuka.I-cerium dioxide isetyenziswe ngokubanzi kumatshini ochanekileyo womphezulu wezixhobo ze-microelectronic kunye nezinto ezichanekileyo zokukhanya.
I-Cerium oxide ipolishi yokupholisha (VK-Ce01) umgubo wokupholisha uneengenelo zesakhono esinamandla sokusika, ukusebenza kakuhle kokupholisha, ukuchaneka kokupholisha okuphezulu, umgangatho olungileyo wokupolisha, indawo yokusebenza ecocekileyo, ungcoliseko oluphantsi, ubomi benkonzo ende, njl. njl., kwaye isetyenziswa kakhulu i-optical precision polishing kunye ne-CMP, njl njl. ikwindawo ebaluleke kakhulu.
Iimpawu ezisisiseko ze-cerium oxide:
I-Ceria, eyaziwa ngokuba yi-cerium oxide, yi-oxide ye-cerium.Ngeli xesha, i-valence ye-cerium yi-+4, kwaye i-chemical formula yi-CeO2.Imveliso ecocekileyo ngumgubo omhlophe onzima okanye i-cubic crystal, kwaye imveliso engcolileyo i-yellow yellow okanye i-pink ukuya kumgubo obomvu obomvu (kuba iqulethe i-lanthanum, i-praseodymium, njl.).Kwiqondo lokushisa kwegumbi kunye noxinzelelo, i-ceria yi-oxide ezinzileyo ye-cerium.I-Cerium inokwenza i-+3 valence Ce2O3, engazinzanga kwaye iya kwenza i-CeO2 ezinzileyo kunye ne-O2.I-Cerium oxide iyanyibilika kancinane emanzini, ialkali kunye neasidi.Ubuninzi be-7.132 g/cm3, indawo yokunyibilika yi-2600℃, kwaye indawo yokubilisa yi-3500℃.
Indlela yokucwenga ye-cerium oxide
Ubunzima beengqungquthela ze-CeO2 abukho phezulu.Njengoko kubonisiwe kwitheyibhile engezantsi, ukuqina kwe-cerium oxide kuphantsi kakhulu kunedayimane kunye ne-aluminium oxide, kwaye kwakhona ngaphantsi kwe-zirconium oxide kunye ne-silicon oxide, elingana ne-ferric oxide.Ke ngoko akwenzeki ngokobuchwephesha ukudiliza izinto ezisekwe kwi-silicon oxide, njengeglasi ye-silicate, iglasi yequartz, njl., kunye ne-ceria enobulukhuni obuphantsi ukusuka kwindawo yokujonga oomatshini kuphela.Nangona kunjalo, i-cerium oxide okwangoku yeyona nto ikhethiweyo yomgubo wokupolisha izinto ezisekwe kwisilicon oxide okanye nakwizinto zesilicon nitride.Ingabonwa ukuba i-cerium oxide polishing nayo inezinye iziphumo ngaphandle kweziphumo zoomatshini.Ukuqina kwedayimani, okuyindawo eqhelekileyo esetyenziswayo yokusila kunye nokupholisha, ihlala inezithuba zeoksijini kwilathisi ye-CeO2, etshintsha iimpawu zayo zomzimba kunye neekhemikhali kwaye ibe nefuthe elithile kwiimpawu zokupholisha.Ngokuqhelekileyo i-cerium oxide polishing powders esetyenziswa ngokuqhelekileyo iqulethe umlinganiselo othile wezinye iioksidi zomhlaba ezinqabileyo.I-Praseodymium oxide (i-Pr6O11) nayo inobuso obuphakathi kwesakhiwo se-cubic lattice, esilungele ukupolishwa, ngelixa ezinye i-lanthanide ezinqabileyo zomhlaba oxides azinakho ukupholisa.Ngaphandle kokutshintsha i-crystal structure ye-CeO2, inokwenza isisombululo esiqinileyo kunye nayo ngaphakathi koluhlu oluthile.Ukucoceka okuphezulu kwe-nano-cerium oxide yomgubo wokupholisha (VK-Ce01), kokukhona kuphezulu ukucoceka kwe-cerium oxide (VK-Ce01), kokukhona amandla okugudisa kunye nobomi benkonzo obude, ngakumbi kwiglasi eqinileyo kunye neelensi zequartz zamehlo ixesha elide.Xa i-cyclic polishing, kuyacetyiswa ukuba kusetyenziswe i-cerium oxide powder polishing powder (VK-Ce01) ephezulu.
Ukusetyenziswa kwepolishi yecerium oxide:
I-Cerium oxide ipolishi yomgubo (i-VK-Ce01), isetyenziswa ikakhulu kwiimveliso zeglasi, isetyenziswa ikakhulu kwezi ndawo zilandelayo:
1. Iiglasi, ukupolisha iilensi zeglasi;
2. I-lens ye-Optical, i-glass optical, i-lens, njl.;
3. Iglasi yesikrini sefowuni yeselula, indawo yokubukela (umnyango wokubukela), njl.;
4. LCD esweni zonke iintlobo LCD screen;
5. I-Rhinestones, iidayimani ezishushu (amakhadi, iidayimani kwi-jeans), iibhola zokukhanyisa (iikhanyisa zokunethezeka kwiholo elikhulu);
6. Ubugcisa bekristale;
7. Inxalenye yokupholishwa kwejade
Izinto eziphuma ngoku zokupolisha i-cerium oxide:
Umphezulu we-cerium oxide ufakwe nge-aluminiyam ukuze uphucule ngokubonakalayo ukukhazimliswa kweglasi yeglasi.
ISebe loPhando lobuChwepheshe kunye noPhuhliso lwe-UrbanMines Tech.Incinci, ecetywayo ukuba ukudityaniswa kunye nokuguqulwa komphezulu wamasuntswana okupholisha zezona ndlela ziphambili kunye neendlela zokuphucula ukusebenza kakuhle kunye nokuchaneka kokupolisha kweCMP.Ngenxa yokuba iipropathi ze-particle zinokulungiswa ngokuxutywa kwezinto ezininzi, kunye nokuzinza kwe-dispersion kunye nokusebenza kakuhle kwe-polish ye-polish slurry kunokuphuculwa ngokuguqulwa kwendawo.Ukulungiswa kunye nokusebenza kwepolishi ye-CeO2 powder efakwe nge-TiO2 inokuphucula ukusebenza kakuhle kwe-polish ngaphezu kwe-50%, kwaye ngexesha elifanayo, iziphene zomhlaba ziyancipha nge-80%.I-synergistic polishing effect ye-CeO2 ZrO2 kunye ne-SiO2 2CeO2 ii-oxide ezidibeneyo;ke ngoko, itekhnoloji yokulungiselela i-doped ceria micro-nano composite oxides ibaluleke kakhulu kuphuhliso lwezixhobo ezintsha zokuthambisa kunye nengxoxo yendlela yokupholisha.Ukongeza kwixabiso le-doping, urhulumente kunye nokusabalalisa i-dopant kwiinqununu ezidibeneyo nazo zichaphazela kakhulu iipropati zabo zomhlaba kunye nokusebenza kokupholisha.
Phakathi kwazo, ukuhlanganiswa kwamasuntswana okupolisha kunye nesakhiwo sokugquma kunomtsalane ngakumbi.Ngoko ke, ukukhethwa kweendlela kunye neemeko zokwenziwa kubaluleke kakhulu, ngakumbi ezo ndlela zilula kwaye zingabizi.Ukusebenzisa i-hydrated cerium carbonate njengeyona nto iphambili, i-aluminium-doped cerium oxide polishing particles yenziwe nge-wet-phase-phase mechanochemical method.Ngaphantsi kwesenzo samandla omatshini, iinqununu ezinkulu ze-hydrated cerium carbonate ziyakwazi ukucandwa zibe ngamaqhekeza amancinci, ngelixa i-aluminium nitrate iphendula ngamanzi e-ammonia ukuze yenze i-amorphous colloidal particles.Iingqungquthela ze-colloidal zifakwe ngokulula kwi-cerium carbonate particles, kwaye emva kokumisa kunye nokubala, i-aluminium doping inokufezekiswa phezu kwe-cerium oxide.Le ndlela yayisetyenziselwa ukudibanisa i-cerium oxide particles ngeemali ezahlukeneyo ze-doping ye-aluminium, kunye nokusebenza kwabo kokupholisa kubonakaliswe.Emva kokuba isixa esifanelekileyo se-aluminium songezwe kumphezulu we-cerium oxide particles, ixabiso elibi lezinto ezinokuthi zenzeke, nto leyo eyenza ukuba i-gap phakathi kwee-particle abrasive particles.Kukho i-electrostatic repulsion enamandla, ekhuthaza ukuphuculwa kozinzo lokumiswa kwe-abrasive.Kwangaxeshanye, i-adsorption ehambelanayo phakathi kwamasuntswana abrasive kunye nomaleko othambileyo ochajiweyo ngokufanelekileyo ngokutsala umtsalane weCoulomb nawo uya komelezwa, okuluncedo kunxibelelwano oludibeneyo phakathi kwe-abrasive kunye nomgangatho othambileyo kumphezulu weglasi ekhazimlisiweyo, kwaye ikhuthaza. ukuphuculwa kwezinga lokupholisha.